专利详情

专利名称	Single cavity dual-electrode discharge cavity and excimer laser
申请号	US201314040490	专利类型	US
公开（公告）号	US9252557(B2)	公开（授权）日	2016.02.02
申请（专利权）人	中国科学院光电研究院	发明（设计）人	Wang Yu;Zhou Yi;Ding Jinbin;Liu Bin;Zhang Lijia;Zhao Jiangshan;Sha Pengfei
主分类号	H01S3/22	IPC主分类号	H01S3/22;H01S3/08;H01S3/07;H01S3/23;H01S3/038;H01S3/0971;H01S3/225;H01S3/00;H01S3/03;H01S3/036;H01S3/10
专利有效期	Single cavity dual-electrode discharge cavity and excimer laser 至Single cavity dual-electrode discharge cavity and excimer laser	法律状态
说明书摘要	A single-cavity dual-electrode discharge cavity and an excimer laser including such a discharge cavity are disclosed. The discharge cavity may comprise a cavity body and two sets of main discharge electrodes. The cavity body may comprise a left chamber and a right chamber arranged to form a symmetric dual-chamber cavity. The left and right chambers can interface and communicate with each other at a plane of symmetry of the entire discharge cavity. The two sets of main discharge electrodes can be disposed in the left and right chambers on the upper side, respectively. According to the present disclosure, the single-cavity configuration can be used to achieve functions of dual-cavity configurations, such as MOPA, MOPO, and MOPRA. Thus, it is possible to reduce system complexities and also ensure synchronization of discharging in the discharge cavity.