Semiconductor devices and methods for manufacturing the same
- 申请号:US201314144275
- 专利类型:US
- 申请(专利权)人:中国科学院微电子研究所
- 公开(公开)号:US9117926(B2)
- 公开(公开)日:2015.08.25
- 法律状态:
- 出售价格: 面议 立即咨询
专利详情
专利名称 | Semiconductor devices and methods for manufacturing the same | ||
申请号 | US201314144275 | 专利类型 | US |
公开(公告)号 | US9117926(B2) | 公开(授权)日 | 2015.08.25 |
申请(专利权)人 | 中国科学院微电子研究所 | 发明(设计)人 | Zhu Huilong;Liang Qingqing |
主分类号 | H01L21/8234 | IPC主分类号 | H01L21/8234;H01L27/088;H01L21/8238;H01L29/66 |
专利有效期 | Semiconductor devices and methods for manufacturing the same 至Semiconductor devices and methods for manufacturing the same | 法律状态 | |
说明书摘要 | A semiconductor device and a method of manufacturing the same is disclosed. In one aspect, the method comprises forming a first MOSFET having a first gate length in a semiconductor substrate, and forming a second MOSFET having a second gate length in the semiconductor substrate. Furthermore, the second gate length is less than the first gate length, and wherein the second MOSFET has a gate stack in the form of a spacer having a gate conductor and a gate dielectric isolating the gate conductor from the semiconductor substrate. |
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