专利详情

专利名称	Device and method for detecting optical performance of beam shaping element
申请号	US201114125581	专利类型	US
公开（公告）号	US9121788(B2)	公开（授权）日	2015.09.01
申请（专利权）人	中国科学院上海光学精密机械研究所	发明（设计）人	Zhu Jing;Huang Huijie;Zeng Aijun;Hu Zhonghua;Yang Baoxi;Chen Ming
主分类号	G01M11/02	IPC主分类号	G01M11/02;G03F7/20;G02B19/00;B23K26/06;B23K26/30
专利有效期	Device and method for detecting optical performance of beam shaping element 至Device and method for detecting optical performance of beam shaping element	法律状态
说明书摘要	A detection apparatus and method for testing optical performance of beam shaping element used in ultraviolet lithography machine; The apparatus comprises visible wavelength laser and other optical units placed along the optical axis including, in order from laser side, (a) beam expander lens group, (b) beam splitter, (c) first far field imaging lens, (d) adjustable aperture or (e) CCD image sensor, (f) second far field imaging lens and (g) energy sensor. The detection apparatus is suitable be employed to detect the optical performance of beam shaping element working at any ultraviolet band, and provides the features of low cost, easy operation and quick measurement.