3D integrated circuit structure, semiconductor device and method of manufacturing same
- 申请号:US201013062001
- 专利类型:US
- 申请(专利权)人:中国科学院微电子研究所
- 公开(公开)号:US9064849(B2)
- 公开(公开)日:2015.06.23
- 法律状态:
- 出售价格: 面议 立即咨询
专利详情
专利名称 | 3D integrated circuit structure, semiconductor device and method of manufacturing same | ||
申请号 | US201013062001 | 专利类型 | US |
公开(公告)号 | US9064849(B2) | 公开(授权)日 | 2015.06.23 |
申请(专利权)人 | 中国科学院微电子研究所 | 发明(设计)人 | Zhu Huilong |
主分类号 | H01L21/4763 | IPC主分类号 | H01L21/4763;H01L23/48;H01L25/065;H01L25/00 |
专利有效期 | 3D integrated circuit structure, semiconductor device and method of manufacturing same 至3D integrated circuit structure, semiconductor device and method of manufacturing same | 法律状态 | |
说明书摘要 | The present invention discloses a semiconductor device. In one embodiment, the semiconductor device comprises a substrate, a diffusion stop layer formed on the substrate, an SOI layer formed on the diffusion stop layer, an MOSFET transistor formed on the SOI layer, and a TSV formed in a manner of penetrating through the substrate, the diffusion stop layer, the SOI layer, and a layer where the MOSFET transistor is located; and an interconnect structure connecting the MOSFET transistor and the TSV. |
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