专利详情

专利名称	Laser micro/nano processing system and method
申请号	US201113824634	专利类型	US
公开（公告）号	US9187318(B2)	公开（授权）日	2015.11.17
申请（专利权）人	中国科学院理化技术研究所	发明（设计）人	Duan Xuanming;Chen Shu;Cao Hongzhong;Dong Xianzi;Zhao Zhensheng
主分类号	H01L21/00	IPC主分类号	H01L21/00;B81C1/00;B23K26/06;B23K26/067;B23K26/08;H01L21/02;G03F7/20
专利有效期	Laser micro/nano processing system and method 至Laser micro/nano processing system and method	法律状态
说明书摘要	A laser micro/nano processing system (100, 200, 300, 400) comprises: a laser light source used to provide a first laser beam having a first wavelength and a second laser beam having a second wavelength different from the first wavelength, with the pulse width of the first laser beam being in the range from a nanosecond to a femtosecond; an optical focusing assembly used to focus the first laser beam and the second laser beam to the same focal point; and a micro mobile platform (21) controlled by a computer. Also disclosed are a method for micro/nano-processing photosensitive materials with a laser and a method for fabricating a device with a micro/nano structure using laser two-photon direct writing technology. In the system and methods, spatial and temporal overlapping of two laser beams is utilized, so as to obtain a micro/nano structure with a processing resolution higher than that of a single laser beam, using an average power lower than that of a single laser beam.