专利详情

专利名称	DEVICE AND METHOD FOR DETECTING OPTICAL PERFORMANCE OF BEAM SHAPING ELEMENT
申请号	EP20110838977	专利类型	EP
公开（公告）号	EP2562526(B1)	公开（授权）日	2016.10.19
申请（专利权）人	中国科学院上海光学精密机械研究所	发明（设计）人	ZHU, JING;HUANG, HUIJIE;ZENG, AIJUN;HU, ZHONGHUA;YANG, BAOXI;CHEN, MING
主分类号	G03F7/20	IPC主分类号	G03F7/20;B23K26/70;G02B19/00
专利有效期	DEVICE AND METHOD FOR DETECTING OPTICAL PERFORMANCE OF BEAM SHAPING ELEMENT 至DEVICE AND METHOD FOR DETECTING OPTICAL PERFORMANCE OF BEAM SHAPING ELEMENT	法律状态
说明书摘要	A detection apparatus and method for testing optical performance of beam shaping element used in ultraviolet lithography machine; The apparatus comprises visible wavelength laser and other optical units placed along the optical axis including, in order from laser side, (a) beam expander lens group, (b) beam splitter, (c) first far field imaging lens, (d) adjustable aperture or (e) CCD image sensor, (f) second far field imaging lens and (g) energy sensor. The detection apparatus is suitable be employed to detect the optical performance of beam shaping element working at any ultraviolet band, and provides the features of low cost, easy operation and quick measurement.