专利详情

专利名称	Miniature thermoelectric energy harvester and fabrication method thereof
申请号	US201214110141	专利类型	US
公开（公告）号	US8853814(B2)	公开（授权）日	2014.10.07
申请（专利权）人	中国科学院上海微系统与信息技术研究所	发明（设计）人	Xu Dehui;Xiong Bin;Wang Yuelin
主分类号	H01L35/10	IPC主分类号	H01L35/10;H01L35/32;H01L35/22;H01L35/34
专利有效期	Miniature thermoelectric energy harvester and fabrication method thereof 至Miniature thermoelectric energy harvester and fabrication method thereof	法律状态
说明书摘要	A miniature thermoelectric energy harvester and a fabrication method thereof. Annular grooves are fabricated on a low-resistivity silicon substrate to define silicon thermoelectric columns, an insulating layer is fabricated on the annular grooves, a thermoelectric material is filled in the annular grooves to form annular thermoelectric columns, and then metal wirings, passivation layers and supporting substrates are fabricated, thereby completing the fabrication process. The silicon thermoelectric column using a silicon base material simplifies the fabrication process. The fabrication of the thermocouple structure is one thin-film deposition process, which simplifies the process. The use of silicon as a component of the thermocouple has a high Seebeck coefficient. The use of vertical thermocouples improves the stability. Since the thermocouple structure is bonded to the upper supporting substrate and lower supporting substrate by wafer-level bonding, the fabrication efficiency is improved.