Semiconductor device and manufacturing method thereof
- 申请号:US201113497249
- 专利类型:US
- 申请(专利权)人:中国科学院微电子研究所
- 公开(公开)号:US8816326(B2)
- 公开(公开)日:2014.08.26
- 法律状态:
- 出售价格: 面议 立即咨询
专利详情
专利名称 | Semiconductor device and manufacturing method thereof | ||
申请号 | US201113497249 | 专利类型 | US |
公开(公告)号 | US8816326(B2) | 公开(授权)日 | 2014.08.26 |
申请(专利权)人 | 中国科学院微电子研究所 | 发明(设计)人 | Yin Huaxiang;Luo Jun;Zhao Chao;Liu Honggang;Chen Dapeng |
主分类号 | H01L29/78 | IPC主分类号 | H01L29/78;H01L29/66;H01L29/778;H01L29/08 |
专利有效期 | Semiconductor device and manufacturing method thereof 至Semiconductor device and manufacturing method thereof | 法律状态 | |
说明书摘要 | A semiconductor device, which comprises: a semiconductor substrate; a channel region on the semiconductor substrate, said channel region including a quantum well structure; a source region and a drain region on the sides of the channel region; a gate structure on the channel region; wherein the materials for the channel region, the source region and the drain region have different energy bands, and a tunneling barrier structure exists between the source region and the channel region. |
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