专利详情

专利名称	Apparatus and method for detecting optical profile
申请号	US201113214645	专利类型	US
公开（公告）号	US8842292(B2)	公开（授权）日	2014.09.23
申请（专利权）人	中国科学院光电技术研究所	发明（设计）人	Jia Xin;Xing Tingwen
主分类号	G01B11/02	IPC主分类号	G01B11/02;G01B11/30;G01B11/24;G01B9/02
专利有效期	Apparatus and method for detecting optical profile 至Apparatus and method for detecting optical profile	法律状态
说明书摘要	Apparatus and methods for detecting optical profile are disclosed herein. In one embodiment, an apparatus includes a laser, a beam splitter, a collimation optical unit, first and second holders respectively holding a first test flat mirror and a second test flat mirror, a phase shifter connected with the first holder, and an angular measurement unit for measuring an angular error of the first test flat mirror and the second test flat mirror on the two holders. The first test flat mirror has a first test flat and the second test flat mirror has a second test flat. The apparatus further includes a planar imaging unit for generating the interfered test light having a direction generally along an x-axis direction of the first test flat and an x-axis direction of the second test flat and a convergence optical unit for projecting the interfered test light onto a detector.