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Nano-patterned system and magnetic-field applying device thereof

  • 申请号:US201214389972
  • 专利类型:US
  • 申请(专利权)人:中国科学院物理研究所
  • 公开(公开)号:US9484138(B2)
  • 公开(公开)日:2016.11.01
  • 法律状态:
  • 出售价格: 面议
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专利详情

专利名称 Nano-patterned system and magnetic-field applying device thereof
申请号 US201214389972 专利类型 US
公开(公告)号 US9484138(B2) 公开(授权)日 2016.11.01
申请(专利权)人 中国科学院物理研究所 发明(设计)人 Yu Guoqiang;Guo Peng;Han Xiufeng;Guo Chaohui;Sun Xiaoyu;Zhou Xiangqian
主分类号 H01F7/20 IPC主分类号 H01F7/20;H01F41/00;G01R33/09;H01L43/12;H01J37/09
专利有效期 Nano-patterned system and magnetic-field applying device thereof 至Nano-patterned system and magnetic-field applying device thereof 法律状态
说明书摘要 A nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device. The magnetic-field applying device comprises a power supply, magnetic poles, and a magnetic-field generation device having a magnetic conductive soft iron core and a coil connected to the power supply and wound on the soft iron core to generate a magnetic field. The soft iron core is a semi-closed frame structure and the magnetic poles are respectively disposed at the two ends of the semi-closed frame structure. The sample stage is inside the vacuum chamber. The magnetic poles are opposite one another inside the vacuum chamber with respect to the sample stage. The coil and soft iron core are outside the vacuum chamber. The soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles locate a sample on the sample stage and apply a local magnetic field.

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